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Event

Fabrication Processes in Microsystem Technology [WS222143882]

Type

lecture (V)
Präsenz/Online gemischt

Term

WS 22/23

SWS

2

Language

Deutsch

Appointments

15

Links

ILIAS

Lecturers

Dr. Klaus Bade

Organisation

Institut für Mikrostrukturtechnik

Part of

Brick Fabrication Processes in Microsystem Technology | Industrial Engineering and Management (M.Sc.)
Brick Fabrication Processes in Microsystem Technology | Economics Engineering (M.Sc.)

Literature

M. Madou
Fundamentals of Microfabrication

CRC Press, Boca Raton, 1997

W. Menz, J. Mohr, O. Paul

Mikrosystemtechnik für Ingenieure

Dritte Auflage, Wiley-VCH, Weinheim 2005

L.F. Thompson, C.G. Willson, A.J. Bowden
Introduction to Microlithography
2nd Edition, ACS, Washington DC, 1994

Appointments

26.10.2022 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
02.11.2022 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
09.11.2022 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
16.11.2022 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
23.11.2022 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
30.11.2022 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
07.12.2022 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
14.12.2022 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
21.12.2022 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
11.01.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
18.01.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
25.01.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
01.02.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
08.02.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
15.02.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016