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Event

Fabrication Processes in Microsystem Technology [SS242143882]

Type
lecture (V)
Präsenz
Term
SS 2024
SWS
2
Language
Deutsch
Appointments
13

Lecturers

Organisation

  • Institut für Mikrostrukturtechnik

Part of

Literature

M. Madou
Fundamentals of Microfabrication

CRC Press, Boca Raton, 1997

W. Menz, J. Mohr, O. Paul

Mikrosystemtechnik für Ingenieure

Dritte Auflage, Wiley-VCH, Weinheim 2005

L.F. Thompson, C.G. Willson, A.J. Bowden
Introduction to Microlithography
2nd Edition, ACS, Washington DC, 1994

Appointments

  • 17.04.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 24.04.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 08.05.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 15.05.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 29.05.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 05.06.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 12.06.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 19.06.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 26.06.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 03.07.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 10.07.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 17.07.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
  • 24.07.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016

Note

The lecture offers an advanced understanding of manufacturing processes in microsystem technology. Basic aspects of microtechnological processing will be introduced. With examples from semiconductor microfabrication and microsystem technology the base processing steps for conditioning and finishing, patterning, removal are imparted. Nano-patterning is covered is also included and the micro-nano interface is discussed. By the help of typical processing steps elementary mechanisms, process execution, and equipment are explained. Additionally quality control, process control and environmental topics are included