Event
Fabrication Processes in Microsystem Technology [SS242143882]
Type
lecture (V)Präsenz
Term
SS 2024SWS
2Language
DeutschAppointments
13Lecturers
Organisation
- Institut für Mikrostrukturtechnik
Part of
Literature
M. Madou
Fundamentals of Microfabrication
CRC Press, Boca Raton, 1997
W. Menz, J. Mohr, O. Paul
Mikrosystemtechnik für Ingenieure
Dritte Auflage, Wiley-VCH, Weinheim 2005
L.F. Thompson, C.G. Willson, A.J. Bowden
Introduction to Microlithography
2nd Edition, ACS, Washington DC, 1994
Appointments
- 17.04.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 24.04.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 08.05.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 15.05.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 29.05.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 05.06.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 12.06.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 19.06.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 26.06.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 03.07.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 10.07.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 17.07.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
- 24.07.2024 08:00 - 09:30 - Room: 20.30 Seminarraum 0.016
Note
The lecture offers an advanced understanding of manufacturing processes in microsystem technology. Basic aspects of microtechnological processing will be introduced. With examples from semiconductor microfabrication and microsystem technology the base processing steps for conditioning and finishing, patterning, removal are imparted. Nano-patterning is covered is also included and the micro-nano interface is discussed. By the help of typical processing steps elementary mechanisms, process execution, and equipment are explained. Additionally quality control, process control and environmental topics are included