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Event

Fabrication Processes in Microsystem Technology [WS192143882]

Type

lecture (V)

Term

WS 19/20

SWS

2

Language

Deutsch

Appointments

15

Links

ILIAS

Lecturers

Dr. Klaus Bade

Organisation

Institut für Mikrostrukturtechnik

Part of

Brick Fabrication Processes in Microsystem Technology | Industrial Engineering and Management (M.Sc.)
Brick Fabrication Processes in Microsystem Technology | Economics Engineering (M.Sc.)

Literature

M. Madou
Fundamentals of Microfabrication

CRC Press, Boca Raton, 1997

W. Menz, J. Mohr, O. Paul

Mikrosystemtechnik für Ingenieure

Dritte Auflage, Wiley-VCH, Weinheim 2005

L.F. Thompson, C.G. Willson, A.J. Bowden
Introduction to Microlithography
2nd Edition, ACS, Washington DC, 1994

Appointments

16.10.2019 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
23.10.2019 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
30.10.2019 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
06.11.2019 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
13.11.2019 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
20.11.2019 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
27.11.2019 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
04.12.2019 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
11.12.2019 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
18.12.2019 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
08.01.2020 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
15.01.2020 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
22.01.2020 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
29.01.2020 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)
05.02.2020 15:45 - 17:15 - Room: 50.41 Raum -108 (UG)