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Event

Fabrication Processes in Microsystem Technology [WS232143882]

Type

lecture (V)
Präsenz/Online gemischt

Term

WS 23/24

SWS

2

Language

Deutsch

Appointments

14

Links

ILIAS

Lecturers

Dr. Klaus Bade

Organisation

Institut für Mikrostrukturtechnik

Part of

Brick Fabrication Processes in Microsystem Technology | Industrial Engineering and Management (M.Sc.)
Brick Fabrication Processes in Microsystem Technology | Economics Engineering (M.Sc.)

Literature

M. Madou
Fundamentals of Microfabrication

CRC Press, Boca Raton, 1997

W. Menz, J. Mohr, O. Paul

Mikrosystemtechnik für Ingenieure

Dritte Auflage, Wiley-VCH, Weinheim 2005

L.F. Thompson, C.G. Willson, A.J. Bowden
Introduction to Microlithography
2nd Edition, ACS, Washington DC, 1994

Appointments

25.10.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
08.11.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
15.11.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
22.11.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
29.11.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
06.12.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
13.12.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
20.12.2023 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
10.01.2024 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
17.01.2024 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
24.01.2024 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
31.01.2024 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
07.02.2024 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016
14.02.2024 09:45 - 11:15 - Room: 20.30 Seminarraum 0.016