Event
Fabrication Processes in Microsystem Technology [WS202143882]
Type
lecture (V)Term
WS 20/21SWS
2Language
DeutschAppointments
14Lecturers
Organisation
- Institut für Mikrostrukturtechnik
Part of
Literature
M. Madou
Fundamentals of Microfabrication
CRC Press, Boca Raton, 1997
W. Menz, J. Mohr, O. Paul
Mikrosystemtechnik für Ingenieure
Dritte Auflage, Wiley-VCH, Weinheim 2005
L.F. Thompson, C.G. Willson, A.J. Bowden
Introduction to Microlithography
2nd Edition, ACS, Washington DC, 1994
Appointments
- 04.11.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 11.11.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 18.11.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 25.11.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 02.12.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 09.12.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 16.12.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 23.12.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 13.01.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 20.01.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 27.01.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 03.02.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 10.02.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
- 17.02.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
Note
The lecture offers a specialization in manufacturing technology for structure generation in microtechnology. Basic aspects of microtechnical manufacturing are introduced. By means of examples from chip technology and microsystem technology, the basic techniques of pre- and post-treatment, structure build-up, decoating for the production of semi-finished products, tools and micro components are taught. Processes for the production of nanostructures and the nano/micro interface are also dealt with. In typical examples, elementary mechanisms, process control and plant engineering are presented after the production sequence has been introduced. In addition, aspects of production measurement technology, process control and environment, especially for wet processes, are also included.
Table of contents
1. Basics of microtechnical production
2. General manufacturing steps
2.1 Pretreatment / Cleaning / Rinsing
2.2. Coating processes (from spin coating to self-assembly)
2.3, Microstructuring: additive and subtractive
2.4 Decoating
3. Microtechnical tool production: masks and forming tools
4. Interconnects (Damascene process), modern conductor path construction
5. Wet processes in the LIGA process
6. Design of process sequences