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Event

Fabrication Processes in Microsystem Technology [WS202143882]

Type
lecture (V)
Term
WS 20/21
SWS
2
Language
Deutsch
Appointments
14

Lecturers

Organisation

  • Institut für Mikrostrukturtechnik

Part of

Literature

M. Madou
Fundamentals of Microfabrication

CRC Press, Boca Raton, 1997

W. Menz, J. Mohr, O. Paul

Mikrosystemtechnik für Ingenieure

Dritte Auflage, Wiley-VCH, Weinheim 2005

L.F. Thompson, C.G. Willson, A.J. Bowden
Introduction to Microlithography
2nd Edition, ACS, Washington DC, 1994

Appointments

  • 04.11.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 11.11.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 18.11.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 25.11.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 02.12.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 09.12.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 16.12.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 23.12.2020 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 13.01.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 20.01.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 27.01.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 03.02.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 10.02.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)
  • 17.02.2021 16:00 - 17:30 - Room: 50.41 Raum -108 (UG)

Note

The lecture offers a specialization in manufacturing technology for structure generation in microtechnology. Basic aspects of microtechnical manufacturing are introduced. By means of examples from chip technology and microsystem technology, the basic techniques of pre- and post-treatment, structure build-up, decoating for the production of semi-finished products, tools and micro components are taught. Processes for the production of nanostructures and the nano/micro interface are also dealt with. In typical examples, elementary mechanisms, process control and plant engineering are presented after the production sequence has been introduced. In addition, aspects of production measurement technology, process control and environment, especially for wet processes, are also included.

Table of contents

1. Basics of microtechnical production
2. General manufacturing steps
2.1  Pretreatment / Cleaning / Rinsing
2.2. Coating processes (from spin coating to self-assembly)
2.3, Microstructuring: additive and subtractive
2.4 Decoating
3. Microtechnical tool production: masks and forming tools
4. Interconnects (Damascene process), modern conductor path construction
5. Wet processes in the LIGA process
6. Design of process sequences