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Event
Introduction to Microsystem Technology - Practical Course [SS202143877]
Type
internship (P)Term
SS 2020SWS
2Language
DeutschAppointments
0Lecturers
Organisation
- Institut für Mikrostrukturtechnik
Part of
- Brick Practical Training in Basics of Microsystem Technology | Industrial Engineering and Management (M.Sc.)
- Brick Practical Training in Basics of Microsystem Technology | Industrial Engineering and Management (B.Sc.)
- Brick Practical Training in Basics of Microsystem Technology | Economics Engineering (M.Sc.)
- Brick Practical Training in Basics of Microsystem Technology | Economics Engineering (B.Sc.)
Literature
Menz, W., Mohr, J.: Mikrosystemtechnik für Ingenieure, VCH-Verlag, Weinheim, 1997
Unterlagen zum Praktikum zur Vorlesung ' Grundlagen der Mikrosystemtechnik'
Note
In the practical training includes nine experiments:
1. Hot embossing of plastics micro structures
2. Micro electroforming
3. Mikro optics: "LIGA-micro spectrometer"
4. UV-lithography
5. Optical waveguides
6. Capillary electrophoresis on a chip
7. SAW gas sensor
8. Metrology
9. Atomic force microscopy
Each student takes part in only five experiments.
The experiments are carried out at real workstations at the IMT and coached by IMT-staff.